WebOct 29, 2003 · Abstract. Cathodic arc plasma deposition has become the technology of choice for hard, wear and corrosion resistant coatings for a variety of applications. The history, basic physics of cathodic arc operation, the infamous macroparticle problem and common filter solutions, and emerging high-tech applications are briefly reviewed. WebEnter the email address you signed up with and we'll email you a reset link.
A filtered cathodic arc deposition apparatus and method
WebCathodic arc depositon process: The arc evaporation process begins with the striking of a high current, low voltage arc on the surface of a cathode (known as the target) that gives rise to a small (usually a few … Cathodic arc deposition or Arc-PVD is a physical vapor deposition technique in which an electric arc ... Filtered Cathodic arc can be used as metal ion/plasma source for Ion implantation and ... R. L. Boxman, D. M. Sanders, and P. J. Martin (editors) "Handbook of Vacuum Arc Science and Technology"(1995) Noyes … See more Cathodic arc deposition or Arc-PVD is a physical vapor deposition technique in which an electric arc is used to vaporize material from a cathode target. The vaporized material then condenses on a substrate, forming a See more Industrial use of modern cathodic arc deposition technology originated in Soviet Union around 1960–1970. By the late 70's Soviet government released the use of this technology to the … See more A Sablev type Cathodic arc source, which is the most widely used in the West, consists of a short cylindrically shaped, electrically conductive target at the cathode with one open end. This target has an electrically-floating metal ring surrounding it, … See more The arc evaporation process begins with the striking of a high current, low voltage arc on the surface of a cathode (known as the target) that gives rise to a small (usually a few See more Cathodic arc deposition is actively used to synthesize extremely hard films to protect the surface of cutting tools and extend their life significantly. A wide variety of thin hard-film, … See more • Ion beam deposition • Physical vapor deposition See more drawitem タイミング
磁过滤阴极弧法制备CrCN薄膜结构与组分研究-Structure and …
http://www.surface-techj.com/bmjsen/ch/reader/view_abstract.aspx?file_no=20160504004 Webenhanced chemical vapor deposition(5) , ion-beam deposition(6) , DC and RF magnetron sputtering depositions(7) , ion plating(8) , laser ablation, mass selected ion beam deposition, plasma-immersion ion implantation and deposition(9-11) , and filtered cathodic vacuum arc (FCVA) deposition.(12) Among these, FCVA has been proved as … WebDec 1, 1997 · The filtered cathodic arc deposition apparatus includes a cross shaped vacuum chamber which houses a cathode target having an evaporable surface … draw stage-ドローステージ